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Specific Process Knowledge/Etch/DRIE-Pegasus/showerheadchange: Difference between revisions

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Jmli (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
4,569 edits
Jmli (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
4,569 edits
Line 241: Line 241:
! Original <!-- step -->
! Original <!-- step -->
| 0      <!-- chiller temp -->
| 0      <!-- chiller temp -->
! 2       <!-- dep time -->
! 1       <!-- dep time -->
| 20      <!-- dep pressure -->
| 20      <!-- dep pressure -->
| 150      <!-- C4F8 flow -->
| 150      <!-- C4F8 flow -->
Line 247: Line 247:
| 0    <!-- O2 flow -->
| 0    <!-- O2 flow -->
| 2000      <!-- coil power -->
| 2000      <!-- coil power -->
| 2.4     <!-- etch time -->
| 3     <!-- etch time -->
| 26      <!-- etch pressure -->
| 26      <!-- etch pressure -->
| 0      <!-- C4F8 flow -->
| 0      <!-- C4F8 flow -->
| 275      <!-- SF6 flow -->
| 275      <!-- SF6 flow -->
| 5     <!-- O2 flow -->
| 15     <!-- O2 flow -->
| 2500      <!-- coil power -->
| 2500      <!-- coil power -->
| 35      <!-- platen power -->
| 35      <!-- platen power -->
! New      <!-- Showerhead -->
! New      <!-- Showerhead -->
| [[Specific Process Knowledge/Etch/DRIE-Pegasus/showerheadchange/ProcessD/original | 1]]      <!-- link processes -->
| [[Specific Process Knowledge/Etch/DRIE-Pegasus/showerheadchange/ProcessD/NewPrD | 1]]      <!-- link processes -->
|  <!-- keywords -->
|  <!-- keywords -->
|-
|-
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