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Specific Process Knowledge/Etch/DRIE-Pegasus/showerheadchange: Difference between revisions

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Jmli (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
4,579 edits
Jmli (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
4,579 edits
Line 114: Line 114:
| 140(1.5s) 45      <!-- platen power -->
| 140(1.5s) 45      <!-- platen power -->
|-
|-
! rowspan="4" | Process A    <!-- recipe name -->
! Step1 11 cyc <!-- step -->
! Step1 11 cyc <!-- step -->
| rowspan="2" |20      <!-- chiller temp -->
| rowspan="2" |20      <!-- chiller temp -->
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