Specific Process Knowledge/Etch/DRIE-Pegasus/showerheadchange: Difference between revisions
| Line 81: | Line 81: | ||
! rowspan="7" | Process A <!-- recipe name --> | ! rowspan="7" | Process A <!-- recipe name --> | ||
! Step1 11 cyc <!-- step --> | ! Step1 11 cyc <!-- step --> | ||
| 20 <!-- chiller temp --> | | rowspan="2" |20 <!-- chiller temp --> | ||
! 4 <!-- dep time --> | ! 4 <!-- dep time --> | ||
| 25 <!-- dep pressure --> | | 25 <!-- dep pressure --> | ||
| Line 95: | Line 95: | ||
| 2800 <!-- coil power --> | | 2800 <!-- coil power --> | ||
| 120>>140(1.5s) 45 <!-- platen power --> | | 120>>140(1.5s) 45 <!-- platen power --> | ||
! Old <!-- Showerhead --> | ! rowspan="2" | Old <!-- Showerhead --> | ||
| rowspan="2" |[[Specific Process Knowledge/Etch/DRIE-Pegasus/showerheadchange/ProcessA | 1]] <!-- link processes --> | | rowspan="2" |[[Specific Process Knowledge/Etch/DRIE-Pegasus/showerheadchange/ProcessA | 1]] <!-- link processes --> | ||
| rowspan="2" | <!-- keywords --> | | rowspan="2" | <!-- keywords --> | ||
|- | |- | ||
! Step2 44 cyc <!-- step --> | ! Step2 44 cyc <!-- step --> | ||
! 4 <!-- dep time --> | ! 4 <!-- dep time --> | ||
| 25 <!-- dep pressure --> | | 25 <!-- dep pressure --> | ||
| Line 114: | Line 113: | ||
| 2800 <!-- coil power --> | | 2800 <!-- coil power --> | ||
| 140(1.5s) 45 <!-- platen power --> | | 140(1.5s) 45 <!-- platen power --> | ||
|- | |- | ||
| Cpoly1 <!-- step --> | | Cpoly1 <!-- step --> | ||