Specific Process Knowledge/Etch/IBE⁄IBSD Ionfab 300/SIMS settings: Difference between revisions

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|colspan="3" style="text-align: center;" style="background: #efefef;" | '''IBSD setting for different materials'''
|colspan="3" style="text-align: center;" style="background: #efefef;" | '''SIMS setting for different materials'''


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Revision as of 10:06, 20 April 2015

SIMS setting for different materials
  Lower plate Upper plate
Ti -1
Si -1 (2)
Al -1 1
Cr -1
Ni -6