Specific Process Knowledge/Etch/IBE⁄IBSD Ionfab 300/SIMS settings: Difference between revisions
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Revision as of 10:06, 20 April 2015
SIMS setting for different materials | ||
Lower plate | Upper plate | |
---|---|---|
Ti | -1 | |
Si | -1 | (2) |
Al | -1 | 1 |
Cr | -1 | |
Ni | -6 |