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Specific Process Knowledge/Etch/DRIE-Pegasus/showerheadchange: Difference between revisions

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Jmli (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
4,579 edits
Jmli (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
4,579 edits
Line 65: Line 65:
! colspan="6" | Deposition step
! colspan="6" | Deposition step
! colspan="7" | Etch step
! colspan="7" | Etch step
! colspan="3" | Process observations
! colspan="3" | Comments
|-
|-
! Time
! Time
Line 80: Line 80:
! Coil  
! Coil  
! Platen
! Platen
| Hardware
| Showerhead
! Runs
! Runs
! width="100" | Key words
! width="100" | Key words
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