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Specific Process Knowledge/Etch/DRIE-Pegasus/showerheadchange: Difference between revisions

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VisualWikitext
Jmli (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
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Jmli (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
4,580 edits
Line 79: Line 79:
! O<sub>2</sub>
! O<sub>2</sub>
! Coil  
! Coil  
| [[Main Page/Process Logs/jmli/Parameters#Platen power|Platen]]
! Platen
| [[Main Page/Process Logs/jmli/Parameters#Hardware | HW]]  
| Hardware]]  
! Runs
! Runs
! width="100" | Key words
! width="100" | Key words
Line 104: Line 104:
|      <!-- keywords -->
|      <!-- keywords -->
|-
|-
! base-A   <!-- recipe name -->
! Baseline   <!-- recipe name -->
| -      <!-- step -->
| -      <!-- step -->
| 30      <!-- chiller temp -->
| 30      <!-- chiller temp -->
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