Specific Process Knowledge/Etch/DRIE-Pegasus/showerheadchange: Difference between revisions
No edit summary |
No edit summary |
||
| Line 35: | Line 35: | ||
| S004593 | | S004593 | ||
| 6" wafer | | 6" wafer | ||
|[[file:S00459305.jpg|50px|frameless ]] | | | ||
[[file:S00459306.jpg|50px|frameless ]] | [[file:S00459305.jpg|50px|frameless ]][[file:S00459306.jpg|50px|frameless ]][[file:S00459307.jpg|50px|frameless ]] | ||
[[file:S00459307.jpg|50px|frameless ]] | [[file:S00459308.jpg|50px|frameless ]][[file:s004593-01.jpg|50px|frameless ]][[file:s004593-02.jpg|50px|frameless ]] | ||
[[file:S00459308.jpg|50px|frameless ]] | [[file:s004593-03.jpg|50px|frameless ]][[file:s004593-04.jpg|50px|frameless ]] | ||
[[file:s004593-01.jpg|50px|frameless ]] | |||
[[file:s004593-02.jpg|50px|frameless ]] | |||
[[file:s004593-03.jpg|50px|frameless ]] | |||
[[file:s004593-04.jpg|50px|frameless ]] | |||
| S004679 | | S004679 | ||
| Wafer centre | | Wafer centre | ||