Specific Process Knowledge/Etch/DRIE-Pegasus/showerheadchange: Difference between revisions
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|+ '''Comparison of processes before and after the change of showerhead in December 2014''' | |||
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! rowspan="2" colspan="2"| Process | |||
! colspan="3"| Before | |||
! colspan="3"| After | |||
|- | |||
! Name | |||
! Description | |||
! Wafer ID | |||
! Comment | |||
! SEM images | |||
! Wafer ID | |||
! Comment | |||
! SEM images | |||
|- | |||
! rowspan="2" width="100"| 15 minutes of black silicon recipe on blank wafer | |||
| S004592 | |||
| Wafer centre | |||
| [[file:S004592 centre.jpg |250px|frameless ]] | |||
| S004679 | |||
| Wafer centre | |||
| [[file:S004679 centre.jpg |250px|frameless ]] | |||
|- | |||
| S004592 | |||
| Wafer edge | |||
| [[file:S004592 edge.jpg |250px|frameless ]] | |||
| S004679 | |||
| Wafer edge | |||
| [[file:S004679 edge.jpg |250px|frameless ]] | |||
|- | |||
|} | |||
{| border="1" cellpadding="1" cellspacing="1" style="text-align:center;" | {| border="1" cellpadding="1" cellspacing="1" style="text-align:center;" | ||
|+ '''Comparison of processes before and after the change of showerhead in December 2014''' | |+ '''Comparison of processes before and after the change of showerhead in December 2014''' | ||