Specific Process Knowledge/Etch/DRIE-Pegasus/showerheadchange: Difference between revisions

Revision as of 14:08, 10 December 2014

**Comparison of processes before and after the change of showerhead in December 2014**
Process		Before			After
Process		Name	Description	Wafer ID	Comment	SEM images	Wafer ID	Comment	SEM images
15 minutes of black silicon recipe on blank wafer	S004592	Wafer centre		S004679	Wafer centre
15 minutes of black silicon recipe on blank wafer	S004592	Wafer edge		S004679	Wafer edge

**Comparison of processes before and after the change of showerhead in December 2014**
Process	Before			After
Process	Wafer ID	Comment	SEM images	Wafer ID	Comment	SEM images
15 minutes of black silicon recipe on blank wafer	S004592	Wafer centre		S004679	Wafer centre
15 minutes of black silicon recipe on blank wafer	S004592	Wafer edge		S004679	Wafer edge

@@ Line 1: / Line 1: @@
+{| border="1" cellpadding="1" cellspacing="1" style="text-align:center;"
+|+ '''Comparison of processes before and after the change of showerhead in December 2014'''
+|-
+! rowspan="2" colspan="2"| Process
+! colspan="3"| Before
+! colspan="3"| After
+|-
+! Name
+! Description
+! Wafer ID
+! Comment
+! SEM images
+! Wafer ID
+! Comment
+! SEM images
+|-
+! rowspan="2" width="100"| 15 minutes of black silicon recipe on blank wafer
+| S004592
+| Wafer centre
+| [[file:S004592 centre.jpg |250px|frameless ]]
+| S004679
+| Wafer centre
+| [[file:S004679 centre.jpg |250px|frameless ]]
+|-
+| S004592
+| Wafer edge
+| [[file:S004592 edge.jpg |250px|frameless ]]
+| S004679
+| Wafer edge
+| [[file:S004679 edge.jpg |250px|frameless ]]
+|-
+|}
 {| border="1" cellpadding="1" cellspacing="1" style="text-align:center;"
 |+ '''Comparison of processes before and after the change of showerhead in December 2014'''