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Specific Process Knowledge/Direct Structure Definition: Difference between revisions

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Jehan (talk | contribs)
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!Allowed materials
!Allowed materials
|UV Lithography
|Depending on tool used
|2-Photon Polymerization Lithography
|Silicon wafers, Cover slips
|Nano Imprint Lithography
|Nano Imprint Lithography
|Nickel, aluminium, steel, FDTS
|Nickel, aluminium, steel, FDTS
|Laser Micromachining Tool
|Almost any
|Dicing saw
|Silicon, glass, GaN, bonded wafers, LiNbO3
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