Specific Process Knowledge/Direct Structure Definition: Difference between revisions
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|-style="background:LightGrey; color:black" | |-style="background:LightGrey; color:black" | ||
!Allowed materials | !Allowed materials | ||
| | |Depending on tool used | ||
| | |Silicon wafers, Cover slips | ||
|Nano Imprint Lithography | |Nano Imprint Lithography | ||
|Nickel, aluminium, steel, FDTS | |Nickel, aluminium, steel, FDTS | ||
| | |Almost any | ||
| | |Silicon, glass, GaN, bonded wafers, LiNbO3 | ||
|- | |- | ||