Specific Process Knowledge/Etch/DRIE-Pegasus/showerheadchange: Difference between revisions

@@ Line 1: / Line 1: @@
 {| border="1" cellpadding="1" cellspacing="1" style="text-align:center;"
-|+ '''Process parameters'''
+|+ '''Comparison of processes before and after the change of showerhead in December 2014'''
 |-
 ! rowspan="2"| Process
@@ Line 9: / Line 9: @@
 ! Wafer ID
 ! SEM images
-! Parameter change
+! Comment
 ! Wafer ID
 ! SEM images
 |-
+! rowspan="2"| rebe g4-14 black silicon recipe
+| S004592
+| Centre wafer
+| [[file:S004592 centre.jpg |150px|frameless ]]
+| S004592
+| Centre wafer
+| [[file:S004 centre.jpg |150px|frameless ]]
 |}