Specific Process Knowledge/Characterization/Topographic measurement: Difference between revisions
Appearance
No edit summary |
|||
| Line 11: | Line 11: | ||
===Comparing the two profilers and the AFM=== | ===Comparing the two profilers and the AFM=== | ||
{| border="2" cellspacing="0" cellpadding="4" align="center" | {| border="2" cellspacing="0" cellpadding="4" align="center" | ||
! | !. | ||
!Tencor | !Tencor | ||
!Dektak | !Dektak | ||