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Specific Process Knowledge/Characterization/Topographic measurement: Difference between revisions

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===Comparing the two profilers and the AFM===
===Comparing the two profilers and the AFM===
{| border="2" cellspacing="0" cellpadding="4" align="center"
{| border="2" cellspacing="0" cellpadding="4" align="center"
!
!.
!Tencor
!Tencor
!Dektak
!Dektak