Specific Process Knowledge/Lithography/Pretreatment: Difference between revisions
| Line 184: | Line 184: | ||
'''Baseline prime process description:''' | '''Baseline prime process description:''' | ||
1. | 1. Pump-down, 2 min | ||
2. Nitrogen | 2. Nitrogen purge, 3.5 min | ||
3. Heat- up, 10 min | 3. Heat-up, 10 min | ||
4. Vacuum, 4.5 min | 4. Vacuum bake, 4.5 min | ||
5. HMDS prime, 5 min | 5. HMDS prime, 5 min | ||
6. | 6. Chamber exhaust, 3 min | ||
7. Nitrogen | 7. Nitrogen purge, 3.5 min | ||
===Equipment performance and process related parameters=== | ===Equipment performance and process related parameters=== | ||