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Specific Process Knowledge/Wafer and sample drying: Difference between revisions

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image:Spin_dryer_2ny.jpg|Spin dryer 2 for RCA cleaned wafers only in B-1. Can take 4" wafers (top) and 6" wafers (bottom).
image:Spin_dryer_2ny.jpg|Spin dryer 2 for RCA cleaned wafers only in B-1. Can take 4" wafers (top) and 6" wafers (bottom).
image:Spin_dryer_3.jpg|Spin dryer 3 for 4" wafers (top) and 6" wafers (bottom) in D-3.  
image:Spin_dryer_3.jpg|Spin dryer 3 for 4" wafers (top) and 6" wafers (bottom) in D-3.  
image:Spin_dryer_4.jpg|Spin dryer 4 for 4 " wafers (bottom) and 6" wafers (top) in E-5. The cabinet for 6" wafers can also be used for 2" wafers if the insert is placed in the cabinet.</gallery>
image:Spin_dryer_4.jpg|Spin dryer 4 for 4 " wafers (bottom) and 6" wafers (top) in E-4. The cabinet for 6" wafers can also be used for 2" wafers if the insert is placed in the cabinet.</gallery>


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