Specific Process Knowledge: Difference between revisions
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|Epitaxial growth /MOCVD | |Epitaxial growth /MOCVD | ||
| | |Al, As, Ga, In, P. doping: Si, Zn | ||
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|rowspan="2" valign="top"| [[Specific Process Knowledge/Lithography/Coaters|Lithography/Coaters]] | |rowspan="2" valign="top"| [[Specific Process Knowledge/Lithography/Coaters|Lithography/Coaters]] | ||