Specific Process Knowledge/Wafer cleaning/IMEC: Difference between revisions

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-===IMEC process for cleaning of wafers before fusion bonding:===
+===The IMEC process is used for cleaning of wafers prior to fusion bonding:===
-Based on the IMEC clean process: ''M. Meuris et al. "The IMEC clean: A new concept for particle and metal removal on Si surfaces.", Solid state Technology, Vol. 38, Issue 7, pp 109-113, 1995.'' <br \>
+This procedure is based on the IMEC cleaning process: ''M. Meuris et al. "The IMEC clean: A new concept for particle and metal removal on Si surfaces.", Solid state Technology, Vol. 38, Issue 7, pp 109-113, 1995.'' <br \>
 Has been slightly modified by Karen Birkelund.