Specific Process Knowledge/Wafer and sample drying: Difference between revisions
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= Critical point dryer = | = Critical point dryer = | ||
If your wafers are fragile or having thin membranes, cantilevers or suspended bridges that risk to stick or adhere to the surface it can be a good idea to dry your wafers in the critical point dryer. | |||
[[image:Spin_dryer_3.jpg|200x350px|left|thumb|Critical point dryer is placed to the right of the spin dryer 3 in D-3]] | [[image:Spin_dryer_3.jpg|200x350px|left|thumb|Critical point dryer is placed to the right of the spin dryer 3 in D-3]] | ||