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Specific Process Knowledge/Wafer and sample drying: Difference between revisions

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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
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Kabi (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
1,146 edits
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If your wafers are fragile or having thin membranes, cantilevers or suspended bridges that risk to stick or adhere to the surface it can be a good idea to dry your wafers in the ethanol fume dryer. Ethanol is heated to 70°C and your wafers are placed in the fumes of Ethanol which will make the water to evaporate from the surface.
If your wafers are fragile or having thin membranes, cantilevers or suspended bridges that risk to stick or adhere to the surface it can be a good idea to dry your wafers in the ethanol fume dryer. Ethanol is heated to 70°C and your wafers are placed in the fumes of Ethanol which will make the water to evaporate from the surface.


[[image:Ethanol fume dry.jpg|200x350px|left|thumb|Ethanol fume dry is placed to the left of the KOH1 in C-1]]
[[image:Ethanol fume dry.jpg|200x350px|left|thumb|Ethanol fume dry is placed to the right of the spin dryer in C-1]]




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