Specific Process Knowledge/Wafer and sample drying: Difference between revisions
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If your wafers are fragile or having thin membranes, cantilever or suspended bridges it can be a good idea to dry your wafers in the ethanol fume dryer. | If your wafers are fragile or having thin membranes, cantilever or suspended bridges it can be a good idea to dry your wafers in the ethanol fume dryer. | ||
[[image:Ethanol fume dry.jpg|200x350px| | [[image:Ethanol fume dry.jpg|200x350px|left|thumb|Ethanol fume dry is placed to the left of the KOH1 in C-1]] | ||
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= Nitrogen guns = | = Nitrogen guns = | ||
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