Specific Process Knowledge/Wafer and sample drying: Difference between revisions
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= Ethanol fume dryer = | = Ethanol fume dryer = | ||
If your wafers are fragile or having thin membranes, cantilever or suspended bridges it can be a good idea to dry your wafers in the ethanol fume dryer. | |||
image:Ethanol fume dry.jpg|Ethanol fume dry is placed to the left of the KOH1 in C-1 | |||
[[image:Ethanol fume dry.jpg|200x350px|right|thumb|Ethanol fume dry is placed to the left of the KOH1 in C-1]] | |||
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