Specific Process Knowledge/Lithography/Baking: Difference between revisions
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!Substrate size | !Substrate size | ||
| | | | ||
* 50 mm | * 50 mm wafer | ||
* 100 mm | * 100 mm wafer | ||
* 150 mm | * 150 mm wafer | ||
| | | | ||
* pieces | * pieces | ||
* 50 mm wafers | * 50 mm wafers | ||
* 100 mm wafers | * 100 mm wafers | ||
* 150 mm | * 150 mm wafer | ||
* 200 mm | * 200 mm wafer | ||
| | | | ||
* pieces | * pieces | ||
* 50 mm wafers | * 50 mm wafers | ||
* 100 mm wafers | * 100 mm wafers | ||
* 150 mm | * 150 mm wafer | ||
| | | | ||
* 100 mm wafers | * 100 mm wafers | ||