Specific Process Knowledge/Thermal Process/Oxidation: Difference between revisions
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==Comparing the six oxidation furnaces== | ==Comparing the six oxidation furnaces== | ||
{| {{table}} border=" | {| {{table}} border="2" cellspacing="0" cellpadding="8" | ||
| align="center" style="background:#f0f0f0;"|'''''' | | valign="top" align="center" style="background:#f0f0f0;"|'''''' | ||
| align="center" style="background:#f0f0f0;"|'''A1 Boron drive-in''' | | valign="top" align="center" style="background:#f0f0f0;"|'''A1 Boron drive-in''' | ||
| align="center" style="background:#f0f0f0;"|'''A3 Phosphorous drive-in''' | | valign="top" align="center" style="background:#f0f0f0;"|'''A3 Phosphorous drive-in''' | ||
| align=" | | valign="top" align="center" style="background:#f0f0f0;"|'''C1 Gate oxide''' | ||
| align="center" style="background:#f0f0f0;"|'''C2 Anneal oxide''' | | valign="top" align="center" style="background:#f0f0f0;"|'''C2 Anneal oxide''' | ||
| align="center" style="background:#f0f0f0;"|'''C3 Anneal bond''' | | valign="top" align="center" style="background:#f0f0f0;"|'''C3 Anneal bond''' | ||
| align="center" style="background:#f0f0f0;"|'''D1 APOX''' | | valign="top" align="center" style="background:#f0f0f0;"|'''D1 APOX''' | ||
| align="center" style="background:#f0f0f0;"|'''Noble''' | | valign="top" align="center" style="background:#f0f0f0;"|'''Noble''' | ||
|-valign="top" | |-valign="top" | ||
! General description | ! General description | ||