Specific Process Knowledge/Lithography/Baking: Difference between revisions
| Line 22: | Line 22: | ||
| | | | ||
Programmable contact bake | Programmable contact bake | ||
*Soft bake | |||
Soft bake | *PEB | ||
| | | | ||
Programmable, ramped contact bake | Programmable, ramped contact bake | ||
*Soft bake of SU-8 | |||
Soft bake | *PEB of SU-8 | ||
| | | | ||
Manual contact bake | Manual contact bake | ||
*Soft bake | |||
Soft bake | |||
| | | | ||
Manual convection bake | Manual convection bake | ||
*Soft bake | |||
Soft bake | |||
| | | | ||
Manual convection bake | Manual convection bake | ||
*Hard bake | |||
Hard bake | |||
| | | | ||
Manual convection bake | Manual convection bake | ||
*Dehydration | |||
Dehydration | |||
|- | |- | ||