Specific Process Knowledge/Lithography/Baking: Difference between revisions
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Maximum 300°C | Maximum 300°C | ||
Maximum temperature may be limited on the individual hotplate | |||
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Fixed at 90°C | Fixed at 90°C | ||
| Line 55: | Line 55: | ||
| | | | ||
Maximum 300°C | Maximum 300°C | ||
Maximum temperature may be limited on the individual hotplate | |||
| | | | ||
Fixed at 90°C | Fixed at 90°C | ||