Specific Process Knowledge/Lithography/Baking: Difference between revisions
| Line 37: | Line 37: | ||
Soft bake | Soft bake | ||
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Variable convection bake | |||
Hard bake | Hard bake | ||
| Line 59: | Line 59: | ||
| | | | ||
120 - 250°C | 120 - 250°C | ||
Return to 120°C after use | |||
| | | | ||
Fixed 250°C | Fixed 250°C | ||