Specific Process Knowledge/Lithography/Baking: Difference between revisions
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Film or pattern of all types except type IV | Film or pattern of all types except type IV | ||
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Respect the allowed materials on the associated spin coater | |||
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Silicon, glass, and polymer substrates | Silicon, glass, and polymer substrates | ||
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Pb, Te films | Pb, Te films | ||
| | |III-V substrates | ||
Respect the restrictions on the associated spin coater | |||
|III-V substrates | |III-V substrates | ||