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Specific Process Knowledge/Lithography/Baking: Difference between revisions

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Taran (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891
3,526 edits
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!Generel description
!Use
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Vapor priming
Soft bake
 
Post-exposure bake (PEB)
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Native oxide strip
Soft bake
 
Post-exposure bake (PEB)
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Soft bake
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Soft bake
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Hard bake
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Dehydration
Dehydration
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