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!Techniques
!Techniques
!Materials
!Materials
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|[[Specific Process Knowledge/Direct Structure Definition|Direct Structure Definition]]
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|
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|Polymer Injection molding
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TOPAS
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LASER micro machining
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Silicon, Metal, Graphene (on silicon), Glass (Pyrex, fused silica), TOPAS, PMMA
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Dicing saw
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Silicon, Glass (Pyrex, fused silica)
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|-
|[[Specific Process Knowledge/Imprinting|Imprinting]]
|[[Specific Process Knowledge/Imprinting|Imprinting]]
|Imprinting
|Imprinting
|
|
*TOPAS
TOPAS, PMMA  
*PMMA  
|-
|-
|[[Specific Process Knowledge/Lithography|Lithography]]
|[[Specific Process Knowledge/Lithography|Lithography]]
|Lithographic definition
|Lithographic definition
|     
|     
*SU8
SU8, AZ resists  
*AZ resists  
|-
|[[Specific Process Knowledge/Direct Structure Definition|Direct Structure Definition]]
|Polymer Injection molding
|
*TOPAS
|-
|[[Specific Process Knowledge/Direct Structure Definition|Direct Structure Definition]]
|
*LASER micro machining
*Dicing saw
|
*Silicon
*Metal sheets
*Graphene (on silicon)
*Glass (Pyrex, fused silica)
*TOPAS
*PMMA
|-
|-
|}  
|}  
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