Specific Process Knowledge: Difference between revisions
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|[[Specific Process Knowledge/Thermal Process|Thermal Process]] | |[[Specific Process Knowledge/Thermal Process|Thermal Process]] | ||
|Annealing (>350C) | |Annealing (>350C) | ||
|Si, PECVD layers, Al, BCB curing | |Si, PECVD layers, Al, BCB curing, Polymer | ||
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