Specific Process Knowledge/Wafer and sample drying: Difference between revisions
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|style="background:WhiteSmoke; color:black"|<b>Critical point dryer</b> | |style="background:WhiteSmoke; color:black"|<b>Critical point dryer</b> | ||
|style="background:WhiteSmoke; color:black"|<b>Ethanol fume dryer</b> | |style="background:WhiteSmoke; color:black"|<b>Ethanol fume dryer</b> | ||
|style="background:WhiteSmoke; color:black"|<b>N<sub>2 | |style="background:WhiteSmoke; color:black"|<b>N<sub>2</sub> guns</b> | ||
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!style="background:silver; color:black;" align="center" width="60"|Location | !style="background:silver; color:black;" align="center" width="60"|Location | ||
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*C-1 | *C-1 | ||
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*In fumehoods and at chemical benches | |||
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!style="background:silver; color:black;" align="center" width="60"|Purpose | !style="background:silver; color:black;" align="center" width="60"|Purpose | ||
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*Drying sensitive samples. E.g. with cantilevers | *Drying sensitive samples. E.g. with cantilevers | ||
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*Drying all kind of samples. | |||
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!style="background:silver; color:black" align="center" valign="center" rowspan="3"|Substrates | !style="background:silver; color:black" align="center" valign="center" rowspan="3"|Substrates | ||
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*1-25 100 mm wafers | *1-25 100 mm wafers | ||
*Pieces if a suitable carrier is available | *Pieces if a suitable carrier is available | ||
*All kind of samples and wafers | |||
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| style="background:LightGrey; color:black"|Allowed materials | | style="background:LightGrey; color:black"|Allowed materials | ||
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*No restriction except for polymers | *No restriction except for polymers | ||
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*No restriction | |||
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