Specific Process Knowledge/Wafer and sample drying: Difference between revisions
| Line 11: | Line 11: | ||
|style="background:WhiteSmoke; color:black"|<b>Spin dryer 4</b> | |style="background:WhiteSmoke; color:black"|<b>Spin dryer 4</b> | ||
|style="background:WhiteSmoke; color:black"|<b>Critical point dryer</b> | |style="background:WhiteSmoke; color:black"|<b>Critical point dryer</b> | ||
|style="background:WhiteSmoke; color:black"|<b>Ethanol | |style="background:WhiteSmoke; color:black"|<b>Ethanol fume dryer</b> | ||
|style="background:WhiteSmoke; color:black"|<b>N<sub>2\sub guns</b> | |||
|- | |- | ||
!style="background:silver; color:black;" align="center" width="60"|Location | !style="background:silver; color:black;" align="center" width="60"|Location | ||