Specific Process Knowledge/Characterization/Element analysis: Difference between revisions
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These charged species are led through a mass spectrometer where a magnetic field is used to deflect them. The deflection increases with charge and decreases with mass and we are therefore able detect and count them according to their mass. This technique is called Secondary Ion Mass Spectrometry or SIMS. | These charged species are led through a mass spectrometer where a magnetic field is used to deflect them. The deflection increases with charge and decreases with mass and we are therefore able detect and count them according to their mass. This technique is called Secondary Ion Mass Spectrometry or SIMS. | ||
{| border="1" cellspacing="0" cellpadding="4" align="center | == Comparison of EDX and SIMS == | ||
{| border="1" cellspacing="0" cellpadding="4" align="center" | |||
!width="100"| | !width="100"| | ||
!width="300" | SEM with EDX | !width="300" | SEM with EDX | ||