Specific Process Knowledge/Characterization/Element analysis: Difference between revisions

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-The technique is highly sensitive and is therefore ideal if you want to check for a contamination. In a typical application one puts three samples into the SIMS.
+== Typical application of SIMS ==
+SIMS is the most sensitive technique for elemental composition. It is therefore ideal if you want to check for a contamination.
+A typical application would be to to check if a metal free chamber had been contaminated with, say, gold. In that case one would put three samples into the SIMS.
+* A bulk gold sample
+* A pristine wafer that has been processed in the contaminated chamber.
+* A clean sample that has definitely not been contaminated: A pristine wafer
+All three samples are then exposed to the caesium beam and the count rate at the mass 196 atomic units (gold) is compared.
 == Depth resolution using EDX ==