Specific Process Knowledge/Back-end processing/Laser Micromachining Tool: Difference between revisions
| Line 133: | Line 133: | ||
* 355nm : 2,86W | * 355nm : 2,86W | ||
* 532nm : 20,716 W | * 532nm : 20,716 W | ||
* 1064nm : | * 1064nm : 24,98 | ||
Repetition rate : 1000 kHz | Repetition rate : 1000 kHz | ||
| Line 139: | Line 139: | ||
* 355nm : 0,98 | * 355nm : 0,98 | ||
* 532nm : 8,031 | * 532nm : 8,031 | ||
* 1064nm : | * 1064nm : 29,44 | ||
Repetition rate : 8000 kHz | Repetition rate : 8000 kHz | ||
| Line 145: | Line 145: | ||
* 355nm :0,04 | * 355nm :0,04 | ||
* 532nm : 1,954 | * 532nm : 1,954 | ||
* 1064nm : | * 1064nm : 30,67 | ||
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