Specific Process Knowledge/Back-end processing/Laser Micromachining Tool: Difference between revisions
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! Values from SAT (Nov. 2012) | ! Values from SAT (Nov. 2012) | ||
! Actual values ( | ! Previous values (May 2014) | ||
! Actual values (Oct 2014) | |||
|- | |- | ||
| Repetition rate : 200kHz | | Repetition rate : 200kHz | ||
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* 532nm : 3,12W | * 532nm : 3,12W | ||
* 1064nm : 33,67W | * 1064nm : 33,67W | ||
| Repetition rate : 200kHz | |||
* 355nm : | |||
* 532nm : | |||
* 1064nm : | |||
Repetition rate : 1000 kHz | |||
* 355nm : | |||
* 532nm : | |||
* 1064nm : | |||
Repetition rate : 8000 kHz | |||
* 355nm : | |||
* 532nm : | |||
* 1064nm : | |||
|} | |||
|} | |} | ||
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