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Specific Process Knowledge/Lithography/Development/Developer TMAH UV-lithography processing: Difference between revisions

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Taran (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891
3,528 edits
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==Combined PEB and development==
==Combined PEB and development==
...
For convenience, the PEB and development function of the machine may be combined in one sequence.


''Flow names and process parameters:''
''Flow names and process parameters:''
*'''DCH 100mm PEB60s@110C+SP60s'''
*'''DCH 100mm PEB60s@110C+SP60s'''
A combination of the 'DCH PEB 110C 60s' post-exposure bake and the 'DCH 100mm SP 60s' development.
A combination of the 'DCH PEB 110C 60s' post-exposure bake and the 'DCH 100mm SP 60s' development.
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