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Specific Process Knowledge/Lithography/Development/Developer TMAH UV-lithography processing: Difference between revisions

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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891
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Taran (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891
3,488 edits
Line 65: Line 65:


==Combined PEB and development==
==Combined PEB and development==
...
''Flow names, process parameters, and test results:''
*'''T1 MiR 701 1um no HMDS'''
*'''T1 MiR 701 1um with HMDS'''
Spin-off: 60 s at 9990 rpm.
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