Specific Process Knowledge/Direct Structure Definition: Difference between revisions
| Line 19: | Line 19: | ||
*Polymers | *Polymers | ||
** SU-8 | ** SU-8 | ||
*** [[Specific Process Knowledge/Lithography/UVLithography|UV Lithography]] | |||
*** [[Specific Process Knowledge/Lithography/3DLithography|2-Photon Polymerization Lithography]] | *** [[Specific Process Knowledge/Lithography/3DLithography|2-Photon Polymerization Lithography]] | ||
** Topas | ** Topas | ||
| Line 28: | Line 29: | ||
*** [[Specific Process Knowledge/Back-end processing/Laser Micromachining Tool|Laser ablation]] | *** [[Specific Process Knowledge/Back-end processing/Laser Micromachining Tool|Laser ablation]] | ||
** AZ resists | ** AZ resists | ||
*** [[Specific Process Knowledge/Lithography/UVLithography|UV Lithography]] | |||
*** [[Specific Process Knowledge/Lithography/3DLithography|2-Photon Polymerization Lithography]] | *** [[Specific Process Knowledge/Lithography/3DLithography|2-Photon Polymerization Lithography]] | ||
** ... | ** ... | ||