Specific Process Knowledge/Doping: Difference between revisions

@@ Line 83: / Line 83: @@
 !Substrate size
 |
-*<nowiki>#</nowiki> 100 mm wafers
+*30 100 mm wafers
 |
-*<nowiki>#</nowiki> 100 mm wafers
+*14 100 mm wafers
 |
-*<nowiki>#</nowiki> small samples
+*small samples
-*<nowiki>#</nowiki> 50 mm wafers
+*50 mm wafers
-*<nowiki>#</nowiki> 100 mm wafers
+*1-3 100 mm wafers
 |
-*<nowiki>#</nowiki> 100 mm wafers (Boron and Phosphor)
+*30 100 mm wafers (Boron and Phosphor)
-*<nowiki>#</nowiki> 150 mm wafers (only Boron)
+*30 150 mm wafers (only Boron)
 |-