Revision as of 14:32, 6 October 2014

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This page is about doping your wafer or making a thin film layer doped with boron, phosphor or Germane.

PECVD - Making boron glass (BSG), phosphorus glass (PSG), boron-phosphorus glass PBSG or germanium doped glass
Furnace LPCVD PolySilicon - Deposition of PolySi doped with B or P
Dope with Boron - Doping Silicon wafers with boron by thermal predeposition and drive-in
Dope with Phosphorus - Doping Silicon wafers with phosphorus by thermal predeposition and drive-in
Ion implantation

	Phosphor predep	Boron predep	PECVD doped thin film	Doped Poly Si
Generel description	Dopants introduced by diffusion from gas-phase (POCL)	Dopants introduced by diffusion from solid source wafers	Deposition of doped thin film (oxides or nitrides)	Dopants introduced by in-situ doping of poly/amorphous Si
Parameter 1	A B	A B	A B	A B
Parameter 2	A B C	A B	A B	A B
Substrate size	# 100 mm wafers	# 100 mm wafers	# small samples # 50 mm wafers # 100 mm wafers	# 100 mm wafers (Boron and Phosphor) # 150 mm wafers (only Boron)
Allowed materials	Allowed material 1 Allowed material 2	Allowed material 1 Allowed material 2 Allowed material 3	Allowed material 1 Allowed material 2 Allowed material 3	Allowed material 1 Allowed material 2 Allowed material 3

Ion beam implantation cannot be done at Danchip. IBS offers ion-beam implantation as a service. See more at: http://www.ion-beam-services.com/about_us.htm

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 *<nowiki>#</nowiki> small samples
 *<nowiki>#</nowiki> 50 mm wafers
 *<nowiki>#</nowiki> 100 mm wafers
-*<nowiki>#</nowiki> 150 mm wafers
 |
 *<nowiki>#</nowiki> 100 mm wafers (Boron and Phosphor)