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Direct Structure Definiton

By direct structure definition we mean that you form the structures for you device directly in the material that the device consist of without any masking steps.

Advantages of direct structure definition may be ..

Quicker process because no need for masking steps
In some cases the structure is defined directly by a computer, so changes in the design can be made very quickly.

Dis-advantages could be

Limited choice of materials
Limited resolution

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Choose method of structuring/equipment

Materials for structuring

Polymers
- SU-8
  - 2-Photon Polymerization Lithography
- Topas
- PMMA
  - Nano Imprint Lithography
  - Laser ablation
- AZ resists
  - 2-Photon Polymerization Lithography
- ...
Metals/Silicon/Graphene
- Laser ablation
Glass
- Laser ablation
- dicing saw
- Sandblasting (at DTU Nanotech).

Comparison of equipment/material

prøveformat/størrelse
forudsætninger
mønsterdannelse
throughput
min/max featuresize
min/max aspect-ratio
post-treatment
degree of freedom

Polymers

Nano Imprint Lithography

2-Photon Polymerization Lithography

Polymer Injection Molder

Laser Micromachining Tool

Generel description

Low Pressure Chemical Vapour Deposition (LPCVD furnace process)

Plasma Enhanced Chemical Vapour Deposition (PECVD process)

Reactive sputtering

Allowed materials

Silicon
Silicon oxide
Silicon nitride
Pure quartz (fused silica)

Processed wafers have to be RCA cleaned

Silicon
Silicon oxide (with boron, phosphorous and germanium)
Silicon nitrides (with boron, phosphorous and germanium)
Pure quartz (fused silica)

Any

Metals/Silicon/Glass