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Specific Process Knowledge/Etch/DryEtchProcessing: Difference between revisions

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| style="background:#DCDCDC;"| Comparison of the different hardware setups
| style="background:#DCDCDC;"| Comparison of the different hardware setups
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| style="background: LightGray"| [[/Bonding| Temporary bonding]]
| style="background: LightGray"| [[/Bonding| Using carrier wafer]]
| style="background: #DCDCDC"| Processing different sizes of substrates by bonding to carriers
| style="background: #DCDCDC"| Processing different sizes of substrates by using a carriers: bonding or not bonding
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| style="background: LightGray"| [[/OES| Optical Endpoint System]]
| style="background: LightGray"| [[/OES| Optical Endpoint System]]