Specific Process Knowledge/Etch/DryEtchProcessing: Difference between revisions
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| style="background:#DCDCDC;"| Comparison of the different hardware setups | | style="background:#DCDCDC;"| Comparison of the different hardware setups | ||
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| style="background: LightGray"| [[/Bonding| | | style="background: LightGray"| [[/Bonding| Using carrier wafer]] | ||
| style="background: #DCDCDC"| Processing different sizes of substrates by bonding | | style="background: #DCDCDC"| Processing different sizes of substrates by using a carriers: bonding or not bonding | ||
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| style="background: LightGray"| [[/OES| Optical Endpoint System]] | | style="background: LightGray"| [[/OES| Optical Endpoint System]] | ||