Specific Process Knowledge/Etch/DryEtchProcessing: Difference between revisions
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| style="background: LightGray"| [[/Comparison| Hardware comparison]] | | style="background: LightGray"| [[/Comparison| Hardware comparison]] | ||
| | ! style="background:#DCDCDC;"| Comparison of the different hardware setups | ||
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|style="background: #DCDCDC" | !style="background: LightGray"| [[/Bonding| Temporary bonding]] | ||
|Processing different sizes of substrates by bonding to carriers | |style="background: #DCDCDC"| Processing different sizes of substrates by bonding to carriers | ||
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