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Specific Process Knowledge/Etch/DryEtchProcessing/Comparison: Difference between revisions

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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
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Created page with "== Hardware and option comparison of the dry etchers at Danchip == The table below compares the hardware and the options. {| border="2" cellspacing="0" cellpadding="0" align..."
 
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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, Bureaucrats, Administrators
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Line 117: Line 117:
| H<sub>2</sub>
| H<sub>2</sub>
|-
|-
| CH<sub>4</sub>
| BCl<sub>3</sub>
| BCl<sub>3</sub>
| Cl<sub>2</sub>
| Cl<sub>2</sub>
|-
| HBr
| HBr
|}
|}
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