Specific Process Knowledge/Etch/DryEtchProcessing: Difference between revisions
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; Equations: | ; Equations: | ||
: Determines what to do with the data from each region. Press Insert and select 'Region Equation'. Here, select | : Determines what to do with the data from each region. Press Insert and select 'Region Equation'. Here, select | ||
* Appropriate names and colors as with regions. | |||
* Spectrum: Only one choice | |||
* Region according to name | |||
* Operation: Typically one will choose 'Max' to find the peak within each region, see image below. Other possibilities are Sum, Average, Min or Median. | |||
; Snapshot: | ; Snapshot: | ||
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; Graphs: | ; Graphs: | ||
: What plots to be displayed. Select | : What plots to be displayed. Select | ||
* Spectral Graphs: This will show the spectrum (typically from 200 nm to 80 nm) of light during the process. | |||
* Trend Graphs: Select which equations to be displayed. These graphs will enable you to monitor the development of the Peaks relevant for you as you etch your sample. | |||
*Sequence, Reprocess and Properties: Beyond the scope of this manual | |||
== Temporary bonding of wafers or chips for dry etching == | == Temporary bonding of wafers or chips for dry etching == | ||