Specific Process Knowledge/Thermal Process/Oxidation/Wet oxidation C1 furnace: Difference between revisions
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===Calculation for wet oxidation=== | ===Calculation for wet oxidation=== | ||
The following links give an approximate oxide time/thickness based on | The following links give an approximate oxide time/thickness based on prediction equations from the following experiments: | ||
[[media:Calculation_for_Wet_oxidation_for_Anneal_Oxide(C1).xlsx|Calculation]] | [[media:Calculation_for_Wet_oxidation_for_Anneal_Oxide(C1).xlsx|Calculation]] | ||
==Test of the wet oxidation by steamer== | ==Test of the wet oxidation by steamer== | ||