Specific Process Knowledge/Thermal Process/Oxidation: Difference between revisions
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*[[Specific Process Knowledge/Thermal Process/A1 Furnace Boron drive-in|Standard recipes, QC limits and results for the Boron Drive-in + Predep furnace (A1)]] | *[[Specific Process Knowledge/Thermal Process/A1 Furnace Boron drive-in|Standard recipes, QC limits and results for the Boron Drive-in + Predep furnace (A1)]] | ||
*[[Specific Process Knowledge/Thermal Process/A3 Phosphor Drive-in furnace|Standard recipes, QC limits and results for the Phosphorus Drive-in furnace (A3)]] | *[[Specific Process Knowledge/Thermal Process/A3 Phosphor Drive-in furnace|Standard recipes, QC limits and results for the Phosphorus Drive-in furnace (A3)]] | ||
*[[Specific Process Knowledge/Thermal Process/Oxidation/wet oxidation C1 furnace|Wet oxidation in Anneal-oxide furnace (C1)]] | |||
==Comparison of the seven oxidation furnaces== | ==Comparison of the seven oxidation furnaces== | ||