Specific Process Knowledge/Etch/DryEtchProcessing: Difference between revisions
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'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Etch/DryEtchProcessing click here]''' | '''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Etch/DryEtchProcessing click here]''' | ||
= Challenges and techniques common to all dry etch tools = | == Challenges and techniques common to all dry etch tools == | ||
This page contains information that is common to dry etch instruments. | This page contains information that is common to dry etch instruments. | ||
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== Hardware and option comparison of the dry etchers at Danchip == | === Hardware and option comparison of the dry etchers at Danchip === | ||
The table below compares the hardware and the options. | The table below compares the hardware and the options. | ||