Specific Process Knowledge/Thermal Process/Oxidation: Difference between revisions
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|.||.||x (with special permission)||x||x||x||. | |.||.||x (with special permission)||x||x||x||. | ||
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!Process temperature | !Process temperature [ <sup>o</sup>C ] | ||
|800-1150||800-1150 ||800-1150||800-1150||800-1150||1150||. | |||
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!Cleanliness of dry oxide (rated 1-5, 1 is best) | !Cleanliness of dry oxide (rated 1-5, 1 is best) | ||