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Specific Process Knowledge/Thermal Process/Oxidation: Difference between revisions

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|.||.||x (with special permission)||x||x||x||.
|.||.||x (with special permission)||x||x||x||.
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!Process temperature
!Process temperature [ <sup>o</sup>C ]
|800-1150 <sup>o</sup>C||800-1150 <sup>o</sup>C||800-1150 <sup>o</sup>C||800-1150 <sup>o</sup>C||800-1150 <sup>o</sup>C||1150 <sup>o</sup>C||.
|800-1150||800-1150 ||800-1150||800-1150||800-1150||1150||.
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!Cleanliness of dry oxide (rated 1-5, 1 is best)
!Cleanliness of dry oxide (rated 1-5, 1 is best)