Specific Process Knowledge/Etch/Etching of Aluminium: Difference between revisions

Revision as of 11:34, 4 January 2008

Etching of aluminium is done wet at Danchip. We have two different solutions:

(1) H $_{2}$ O:H $_{3}$ PO $_{4}$ 1:2 at 50 ^oC (2) Pre-mixed etch solution: PES 77-19-04 at 20 ^oC

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-Al test
+==Etching of Aluminium==
+Etching of aluminium is done wet at Danchip. We have two different solutions:
+(1) H<math>_2</math>O:H<math>_3</math>PO<math>_4</math>  1:2 at 50 <sup>o</sup>C
+(2) Pre-mixed etch solution: PES 77-19-04 at 20 <sup>o</sup>C