Specific Process Knowledge/Thin film deposition/Deposition of Silver: Difference between revisions
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! Sputter evaporation ([[Specific Process Knowledge/Thin film deposition/Wordentec|Wordentec]]) | ! Sputter evaporation ([[Specific Process Knowledge/Thin film deposition/Wordentec|Wordentec]]) | ||
! Sputter deposition ([[Specific Process Knowledge/Thin film deposition/Lesker|Lesker]]) | ! Sputter deposition ([[Specific Process Knowledge/Thin film deposition/Lesker|Lesker]]) | ||
! E-beam evaporation ([[Specific Process Knowledge/Thin film deposition/III-V Dielectric evaporator|III-V Dielectric evaporator]]) | |||
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|-style="background:WhiteSmoke; color:black" | |-style="background:WhiteSmoke; color:black" | ||
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| Sputter deposition of Ag | | Sputter deposition of Ag | ||
| Sputter deposition of Ag | | Sputter deposition of Ag | ||
| E-beam deposition of Ag | |||
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|-style="background:LightGrey; color:black" | |-style="background:LightGrey; color:black" | ||
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|RF Ar clean | |RF Ar clean | ||
|RF Ar clean | |RF Ar clean | ||
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|-style="background:WhiteSmoke; color:black" | |-style="background:WhiteSmoke; color:black" | ||
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|10Å to about 5000Å | |10Å to about 5000Å | ||
|10Å to about 3000Å | |10Å to about 3000Å | ||
|10Å to about 1000Å | |||
|10Å to about 1000Å | |10Å to about 1000Å | ||
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|Depending on [[/Sputter Ag in Wordentec|process parameters]] (also written in the logbook). | |Depending on [[/Sputter Ag in Wordentec|process parameters]] (also written in the logbook). | ||
|Dependent on process parameters. | |Dependent on process parameters. | ||
|2 Å/s to 5 Å/s | |||
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*1x4" wafers or | *1x4" wafers or | ||
*smaller pieces | *smaller pieces | ||
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* 2" wafers or | |||
* Smaller pieces | |||
|-style="background:Lightgrey; color:black" | |-style="background:Lightgrey; color:black" | ||
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* SU-8 | * SU-8 | ||
* Metals | * Metals | ||
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* Silicon | |||
* Silicon oxide | |||
* Silicon (oxy)nitride | |||
* Photoresist | |||
|-style="background:whitesmoke; color:black" | |-style="background:whitesmoke; color:black" | ||
! Comment | ! Comment | ||
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|Only very thin layers. | |Only very thin layers. | ||
|Only very thin layers (up to 100nm). | |Only very thin layers (up to 100nm). | ||
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